Ion implantation
The ion implantation technique is used in the semi-conductor industry to locally modify the composition and physical properties of a substrate, especially when doping agents such as boron, phosphorus and arsenic introduced… The electrodes and graphite protective screens on these machines are subjected to significant erosion caused by ion bombardment.
- Mersen's fine grain and high-density ultra-pure graphite resists erosion very well.
- Mersen has also developed a Vitreous Carbon Impregnation "VCI", to further enhance the strength of these parts, while reducing particle emissions.